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CVD-12II-3Z/G Chemical Vapor Deposition System (CVD)
  
Details
 
1200℃ single/double temperature zone CVD system

1, a double temperature zone furnace body
 
2, a set of flow control
 
3, a set of high vacuum control parts
 
4, accessories:
 
1) One quartz tube
 
2) Quartz plug a pair
 
3) A pair of high-temperature gloves
 
4) A test hook
 
5) A quartz boat
 
6) A set of Φ50 stainless steel quick air circuit assembly, a set of KF25 flange kit, and a set of open-type furnace tube support
System name: 1200℃ double temperature zone CVD system
 
System model: CVD-12II-3G
 
Maximum temperature: 1200℃
 
Length of heating zone: 420mm
 
Constant temperature zone: 280mm
 
Heating element: heating wire
 
Temperature zone: double temperature zone
 
Quartz pipe outer diameter: Φ50mm
 
Temperature control: touch screen temperature control system 50 program temperature control;
 
Accuracy: 0.1 level
 
Control accuracy: ±1℃
 
Maximum working temperature of furnace tube: < 1200℃

Flow control section

 
Gas flange: The place where the new sealing flange is connected to the pipe adopts multi-ring sealing technology to form a seal between the sealing flange and the outer wall of the pipe. The seal is still effective when the outer diameter error of the pipe is large. The installation of the sealing flange only needs to be installed when the equipment is used for the first time

Number of gas paths: 3 quality gas control (the number of gas paths can be selected according to specific needs)

 

Flow meter: HORIBA METRON (Sino-Japanese joint venture brand)

 

Flow range: Standard nitrogen calibration 0-500SCCN (can be customized according to customer needs)

 

Accuracy: ±1%F.S

 

Response time: 1sec

 

Operating temperature: 5-450℃
Working pressure: Intake pressure 0.05-0.3Mpa(surface pressure)

 

System connection: KF quick connection bellows, high vacuum manual flapper valve and digital display vacuum measuring instrument
Vacuum control section

 

Imported vacuum gauge: INFICON vacuum gauge PCG554

 

Vacuum gauge range: 5 x 10-5... 1500 (3.8 x 10-5... 1125) (millibar)

 

High vacuum system pump: pumping speed 6L/S, limit vacuum 3*10-1Pa;

 

Molecular pump: pumping speed 1200L/S, limit vacuum 5*10-6Pa

 

Vacuum degree range: 10-1Pa ~ 10-3Pa

 

Control mode: automatic control

 

Vacuum gauge: thermocouple gauge/ionization gauge